I Think I started recheck...
Fatal error: DNSKEY 2371 signs DNSKEY RRset, but no confirming DS RR in the parent zone found. No chain of trust created. Fatal error: Parent zone has a signed DS RR (Algorithm 13, KeyTag 60191, DigestType 2, Digest MH3BkRknNfXfdv42T29sHxixCMQ4NTFadORQ1k5BBqE=), but the destination DNSKEY doesn't exist or doesn't validate the DNSKEY RR set. No chain of trust created.
so now it have a DNSKEY that doesn't match with DNS RR. what.
and origin connection time out (522) from cloudflare.